- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/20 - Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Patent holdings for IPC class H01J 37/20
Total number of patents in this class: 2076
10-year publication summary
|
201
|
164
|
164
|
153
|
186
|
182
|
194
|
188
|
159
|
48
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Hitachi High-Tech Corporation | 4424 |
243 |
| Hitachi High-Technologies Corporation | 2034 |
200 |
| FEI Company | 851 |
142 |
| ASML Netherlands B.V. | 6816 |
105 |
| NuFlare Technology, Inc. | 770 |
73 |
| JEOL Ltd. | 556 |
60 |
| Protochips, Inc. | 71 |
51 |
| Applied Materials, Inc. | 16587 |
48 |
| Hitachi High-Tech Science Corporation | 326 |
46 |
| Carl Zeiss Microscopy GmbH | 1146 |
35 |
| Varian Semiconductor Equipment Associates, Inc. | 1282 |
32 |
| Axcelis Technologies, Inc. | 429 |
30 |
| Applied Materials Israel, Ltd. | 549 |
26 |
| Hitachi, Ltd. | 16452 |
25 |
| Tokyo Electron Limited | 11599 |
21 |
| Nikon Corporation | 7162 |
18 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
16 |
| Hermes Microvision Incorporated B.V. | 129 |
15 |
| National Institute of Advanced Industrial Science and Technology | 3677 |
14 |
| KLA-Tencor Corporation | 2574 |
13 |
| Other owners | 863 |